JPH0225235Y2 - - Google Patents
Info
- Publication number
- JPH0225235Y2 JPH0225235Y2 JP1746985U JP1746985U JPH0225235Y2 JP H0225235 Y2 JPH0225235 Y2 JP H0225235Y2 JP 1746985 U JP1746985 U JP 1746985U JP 1746985 U JP1746985 U JP 1746985U JP H0225235 Y2 JPH0225235 Y2 JP H0225235Y2
- Authority
- JP
- Japan
- Prior art keywords
- image
- microscope
- characteristic
- probe
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 claims description 20
- 238000012360 testing method Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 description 36
- 235000012431 wafers Nutrition 0.000 description 12
- 238000007689 inspection Methods 0.000 description 9
- 238000005259 measurement Methods 0.000 description 8
- 230000000007 visual effect Effects 0.000 description 8
- 239000013307 optical fiber Substances 0.000 description 6
- 208000003464 asthenopia Diseases 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 3
- 239000002131 composite material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 101100262374 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) CDC21 gene Proteins 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001394 metastastic effect Effects 0.000 description 1
- 206010061289 metastatic neoplasm Diseases 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1746985U JPH0225235Y2 (en]) | 1985-02-08 | 1985-02-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1746985U JPH0225235Y2 (en]) | 1985-02-08 | 1985-02-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61134036U JPS61134036U (en]) | 1986-08-21 |
| JPH0225235Y2 true JPH0225235Y2 (en]) | 1990-07-11 |
Family
ID=30505200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1746985U Expired JPH0225235Y2 (en]) | 1985-02-08 | 1985-02-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0225235Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH084102B2 (ja) * | 1987-07-30 | 1996-01-17 | 東京エレクトロン株式会社 | 半導体検査装置 |
-
1985
- 1985-02-08 JP JP1746985U patent/JPH0225235Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61134036U (en]) | 1986-08-21 |
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